The 631F 1-1000 Torr, Heated (150 or 200°C) Absolute Baratron? Capacitance Manometer, operating at very high internal temperatures, minimizes the deposition of process byproducts within the sensor by nearly eliminating output drift caused by contamination. Its available operating temperatures are 150°C or 200°C, permitting use in the most demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD).

150°C or 200°C operating temperatures reduce contamination
0 to 10 VDC analog output proportional to absolute pressure
Two optional pressure trip relays for controlling external equipment
Inconel? sensor resists corrosion
Performance is unaffected by pressure bursts
Compact design & self-contained electronics save space

MKS Baratron Manometer 1000 Torr 627B13TBC1B
　　MKS Baratron Pressure Switch 100TORR 41A12DCA2AA004
　　MKS Baratron Manometer 0.05 TORR 627A-13120
　　MKS Baratron Pressure Meter Head Type 310CHS-1
　　MKS INSTRUMENTS 631 HEATED BARATRON - REFURBISHED
　　MKS Baratron 120AA 120AA-00001RBJ Capacitance Manometer
　　MKS Baratron LDM Vacuum Gauge Read-Out Dispaly Module
　　MKS Type 170M-6C Baratron Range Multiplier, Powers Up
　　MKS Baratron Type 221B Pressure Gauge Manual
　　MKS BARATRON 622A01TBE 1 Pa/133.32
　　MKS Instruments Baratron 631A11TBEH Transducer
　　MKS Baratron Type 241/241A/241AA Vacuum Pressure Switch
　　MKS Baratron type 241 Vacuum Switch
　　MKS 722A Baratron Manometer 10 TORR with cert