 |  |
| 型号:JX213597RSE1802干式螺杆真空泵 | 型号:JX213602RSE180干式螺杆真空泵 |
|
抽气速度(50/60Hz)Pumping Speed(50/60Hz) |
25000/30000 l/min | |
| 1500/1800 m3/h | ||
| 883/1060 CFM | ||
| 极限压力(Ultimate Pressure) | ≤7.5x10-4 Torr | |
| ≤1.0x10-3 mbar | ||
| ≤1.0 Pa | ||
| 水冷密封马达(Canned Motor) | 频率 Frequency | 50/60 Hz |
| 电压Voltage | 220~440 V | |
| 额定功率Rated Power | 6+6/4.47+4.47 HP/Kw | |
| 连接口(Connection) | 进气口 Inlet | ISO160(bolted) |
| 排气口 Outlet | NW40 | |
| 冷却水 Cooling Water | 压力 Pressure | 2.0~4.0 kg/cm2 |
| 流量 Min. Flow | 3L/min 15℃ | |
| 温度 Temp. | 7L/min 30℃ | |
| 接头 Connection | RC3/8" | |
| 氮气 N2 | 压力 Pressure | 0.15~0.2 Mpa |
| 稀释流量 Dilute Flow | 0~60 L/min | |
| 密封流量 Sealing Flow | 0~20 L/min | |
| 接头 Connection | Swagelok 1/4" | |
| 尺寸 Dimension | 长x宽x高 | 920x430x1030 mm |
| 重量 Weight | 545 Kg | |
| 噪音 Noise | 70 dB(A) | |
| 控制介面 Control | SEMI E73-0299 | |
| 系统漏率 System Max. Leak-rate | 1.0/10-5 mbar.l/s | |
| 室温操作范围 Operation Temp. | 5℃~40℃ | |
| 操作湿度 Operation Moisture | 90%以下 | |
|
抽气速度(50/60Hz)Pumping Speed(50/60Hz) |
2500/3000 l/min | |
| 150/180 m3/h | ||
| 88/106 CFM | ||
| 极限压力(Ultimate Pressure) | ≤7.5x10-3 Torr | |
| ≤1.0x10-2 mbar | ||
| ≤1.0 Pa | ||
| 水冷密封马达(Canned Motor) | 频率 Frequency | 50/60 Hz |
| 电压Voltage | 220~440 V | |
| 额定功率Rated Power | 6/4.47 HP/Kw | |
| 连接口(Connection) | 进气口 Inlet | NW50 |
| 排气口 Outlet | NW40 | |
| 冷却水 Cooling Water | 压力 Pressure | 2.0~4.0 kg/cm2 |
| 流量 Min. Flow | 3L/min 15℃ | |
| 温度 Temp. | 7L/min 30℃ | |
| 接头 Connection | RC3/8" | |
| 氮气 N2 | 压力 Pressure | 0.15~0.2 Mpa |
| 稀释流量 Dilute Flow | 0~60 L/min | |
| 密封流量 Sealing Flow | 0~20 L/min | |
| 接头 Connection | Swagelok 1/4" | |
| 尺寸 Dimension | 长x宽x高 | 920x430x650 mm |
| 重量 Weight | 320 Kg | |
| 噪音 Noise | 70 dB(A) | |
| 控制介面 Control | SEMI E73-0299 | |
| 系统漏率 System Max. Leak-rate | 1.0/10-5 mbar.l/s | |
| 室温操作范围 Operation Temp. | 5℃~40℃ | |
| 操作湿度 Operation Moisture | 90%以下 | |
